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2001 | "Thermodynamic Stability of RuO2 Bottom Electrodes and Their Effect on…

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작성자 관리자 /   작성일2015-08-21 /   조회362회

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Title : Thermodynamic Stability of RuO2 Bottom Electrodes and Their Effect on the Ba-Sr-Ti Oxide Film Quality
Authors: Youn-Jin Oh Sang Heup Moon and Chan-Hwa Chung

Journal : Journal of Electrochemical Society
Vol/No/Page : 148/4/F56-F62
DOI :  10.1149/1.1355689

Abstract :
We have performed calculations to evaluate the thermodynamic stability of RuO2 film and its effect on (Ba, Sr)TiO3(BST) film quality when it is deposited on RuO2 thin film by metallorganic chemical vapor deposition. RuO2 is rather stable when it is annealed in oxygen ambient. However, it was etched by gaseous oxygen when too much oxygen was fed at high temperatures. The degradation of RuO2 occurs in two different reaction pathways depending on process conditions. One is the thermal decomposition of RuO2 that mainly happens when no excess O-2 is present in the feed at low pressures. The other is the etching of RuO2 film by excess O-2, which produces gaseous RuO3 and RuO4 species. The calculation results on the Ba-Sr-Ti-Ru-C-H-O system also present optimal feed composition and process conditions that result in high-quality (Ba, Sr)TiO3 film.

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